SISS02 Program

The 2nd International Symposium on SIMS and Related Techniques has been held on November 8-9, 2002 at Seikei University.

SIMS新技術WG 国際シンポ(初日)


Opening 9:25-9:30  Seikei Univ. M. Kudo

Recent Topics in Materials Characterization

1 Complimentary Use of MEIS and SIMS for Ultrathin Film Analysis 9:30-10:30 Korea Research Inst. of Standards and Science D. W. Moon

2 Wettability and Microstructures of Ni-Al/TiCx System 10:30-11:30 Chinese Academy of Science D. H. Shen, H. Lu, Univ. of Sci. and Tech. of Beijing X. Wu, Ben Gurion Univ. of the Negev N. Froumin, M. Polak

3 In-Situ Surface Analysis by Coaxial Impact-Collision Ion Scattering Spectroscopy (CAICISS) and Time-of-Flight Elastic Recoil Detection Analysis (TOF-ERDA) 11:30-12:00 Osaka Univ. M. Katayama, T. Fujino, K. Oura

D-SIMS and Related Techniques

4 A Floating Type Compact Low Energy Ion Gun for Shallow Dopant Depth Profiling 13:00-13:30  Osaka Univ. T. Matsunami, K.Iwamoto, T. Nagatomi, Y. Kimura, Y. Takai, Osaka Inst. Tech. R. Shimizu, A&ampD Company LTD R. Aihara, Y. Sakuma

5 SPIRIT – Using Advanced Lasers for Sensitive Surface Analysis 13:30-14:30  Univ. of Newcastle B. King

(Coffee Break : 14:30-15:00 )

6 Hydrogen Distributions Near SiO2-Si Interface 15:00-15:30  NEC Corp. Y. Kawashima, Z. Liu, H. Kawano, Seikei Univ. M. Kudo

7 HEstablishing Accuracy in Ultra-Shallow profiling 15:00-15:30  Univ. of Warwick M. Dowsett

Poster Session 16:30-18:30  (Drink Party : 17:00-18:30 )

11月9日(木) SIMS新技術WG 国際シンポ(2日目)

Application of TOF-SIMS Analysis

8 Semiconductor Applications of TOF-SIMS 9:30-10:30  CE&ampA P. Lindely

9 High Resolution TOF-SIMS 10:30-11:30  Tascon B. Hagenhoff


SIMS Application to Bio-science and Earth Science

10 Ion Microscopy for The Element and Molecule Distribution in Fine Structures of The Cell and Tissue on Fresh Frozen Dried Ultrathin Sections 11:30-12:00  Toyama Med. and Pharmaceutical Univ. K. Takaya, H. Li, M. Okabe, T. Yoshida, Nagasaki Univ. H. Gong

11 Isotope Imaging by Charged-Particle 2-D Sensor Equipped with SIMS 12:00-12:30  Tokyo Inst. Tech. H. Yurimoto, T. Kunihiro, K. Nagashima

Recent Topics in SIMS Instrumentation and its Application

12 Recent Atomika Quad-SIMS Developments 13:30-14:30  ATOMIKA J. L. Mau

(Coffee Break : 14:30-15:00 )

13 What’s new in SIMS at Physical Electronics? 16:20-16:40  Physical Electronics S. Bryan

14 The CAMECA SC-ULTRA and the CAMECA SHALLOW PROBE: Two Complementary Analytical Tools for Semiconductors Characterization 16:40-17:00  CAMECA M. Schuhmacher


4. 懇親会について 


5. その他 

  1. 今回の担当幹事は、ファインセラミックスセンター・平山司と東大生研・石井秀司の2名です。今回のプログラムアドバイザーはNTTの本間芳和委員(国際標準化WG座長・運営幹事)が務めます。








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